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High-Power Compact Laser-Plasma Source for X-ray...

Japanese Journal of Applied Physics 2002 / 6 Vol. 41; Iss. Part 1, No

High-Power Compact Laser-Plasma Source for X-ray Lithography

Gaeta, Celestino J., Rieger, Harry, Turcu, I. C. Edmond, Forber, Richard A., Campeau, Serge M., Cassidy, Kelly L., Powers, Michael J., Maldonado, Juan R., French, Gary, Naungayan, Joseph, Kelsey, Char
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4111
Date:
June, 2002
File:
PDF, 254 KB
english, 2002
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