Influence of Surface Oxide of Sputtered TaN on Displacement...

Japanese Journal of Applied Physics 2003 / 4 Vol. 42; Iss. Part 1, No

Influence of Surface Oxide of Sputtered TaN on Displacement Plating of Cu

Wang, Zenglin, Sakaue, Hiroyuki, Shingubara, Shoso, Takahagi, Takayuki
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.1843
Date:
April, 2003
File:
PDF, 344 KB
english, 2003
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