Gap Servo System for a Biaxial Device Using an Optical Gap...

Japanese Journal of Applied Physics 2003 / 5 Vol. 42; Iss. Part 1, No

Gap Servo System for a Biaxial Device Using an Optical Gap Signal in a Near Field Readout System

Ishimoto, Tsutomu, Saito, Kimihiro, Shinoda, Masataka, Kondo, Takao, Nakaoki, Ariyoshi, Yamamoto, Masanobu
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.2719
Date:
May, 2003
File:
PDF, 236 KB
english, 2003
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