Characteristics of Ultra Thin Hf-Silicate Gate Dielectrics on Si 0.9954 C 0.0046 /Si Heterolayers
Liu, Kou-Chen, Maikap, Sidhu, Chen, Pang-ShiuVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2447
Date:
April, 2005
File:
PDF, 281 KB
english, 2005