Nanometer-Order Resolution Displacement Measurement System...

Japanese Journal of Applied Physics 2005 / 6 Vol. 44; Iss. 6B

Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning

Sasaki, Katsuhiro, Nishihira, Morimasa, Imano, Kazuhiko
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.4411
Date:
June, 2005
File:
PDF, 730 KB
english, 2005
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