Fabrication of Ferroelectric Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition Using a Novel Titanium Source Ti(OEt) 2 (DPM) 2
Otani, Yohei, Okamura, Soichiro, Shiosaki, TadashiVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.1752
Date:
March, 2006
File:
PDF, 207 KB
english, 2006