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Study on the O 2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma
Jeong, Chang Hyun, Lee, June Hee, Lim, Jong Hyeuk, Lim, Jong Tae, Yeom, Geun YoungVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.2788
Date:
April, 2006
File:
PDF, 219 KB
english, 2006