Location and Orientation Control of Si Grain by Combining...

Japanese Journal of Applied Physics 2006 / 5 Vol. 45; Iss. 5B

Location and Orientation Control of Si Grain by Combining Metal-Induced Lateral Crystallization and Excimer Laser Annealing

Higashi, Naoyuki, Nakagawa, Gou, Asano, Tanemasa, Miyasaka, Mitsutoshi, Stoemenos, John
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.4347
Date:
May, 2006
File:
PDF, 155 KB
english, 2006
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