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Demonstrative Experiment for Single-Ion Implantation Technique Using Highly Charged Ions
Yoshiyasu, Nobuo, Takahashi, Satoshi, Shibata, Masa-aki, Shimizu, Hiroshi, Nagata, Kazuo, Nakamura, Nobuyuki, Tona, Masahide, Sakurai, Makoto, Yamada, Chikashi, Ohtani, ShunsukeVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.995
Date:
February, 2006
File:
PDF, 108 KB
english, 2006