Demonstrative Experiment for Single-Ion Implantation...

Japanese Journal of Applied Physics 2006 / 2 Vol. 45; Iss. 2A

Demonstrative Experiment for Single-Ion Implantation Technique Using Highly Charged Ions

Yoshiyasu, Nobuo, Takahashi, Satoshi, Shibata, Masa-aki, Shimizu, Hiroshi, Nagata, Kazuo, Nakamura, Nobuyuki, Tona, Masahide, Sakurai, Makoto, Yamada, Chikashi, Ohtani, Shunsuke
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.995
Date:
February, 2006
File:
PDF, 108 KB
english, 2006
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