Deposition of Thin Film Using a Surface Acoustic Wave...

Japanese Journal of Applied Physics 2007 / 7 Vol. 46; Iss. 7B

Deposition of Thin Film Using a Surface Acoustic Wave Device

Murochi, Nobuaki, Sugimoto, Mitsunori, Matsui, Yoshikazu, Kondoh, Jun
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Volume:
46
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.4754
Date:
July, 2007
File:
PDF, 1.91 MB
2007
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