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Optical Performance Evaluation and Aligning Method for Solid Immersion Lens Assembly with Wedge Plate Lateral Shearing Interferometer
Lee, Jin-Eui, Kim, Wan-Chin, Kim, Tae-Seob, Choi, Hyun, Yoon, Yong-Joong, Park, No-Cheol, Park, Young-PilVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.5494
Date:
August, 2007
File:
PDF, 554 KB
english, 2007