Etching Damage in Diamond Studied Using an Energy-Controlled Oxygen Ion Beam
Yamazaki, Yuichi, Ishikawa, Kenji, Mizuochi, Norikazu, Yamasaki, SatoshiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.60
Date:
January, 2007
File:
PDF, 298 KB
english, 2007