Epitaxial Growth of (0001)Ru Thin Films on (111)ZrN/(111)Si by Low-Temperature Process and Their Surface Morphologies
Sakurai, Junpei, Sasaki, Katsutaka, Yanagisawa, Hideto, Shinkai, Satoko, Abe, YoshioVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.1667
Date:
March, 2008
File:
PDF, 148 KB
english, 2008