Imprinted 50 nm Features Fabricated by Step and Stamp UV...

Japanese Journal of Applied Physics 2008 / 6 Vol. 47; Iss. 6

Imprinted 50 nm Features Fabricated by Step and Stamp UV Imprinting

Haatainen, Tomi, Majander, Päivi, Mäkelä, Tapio, Ahopelto, Jouni, Kawaguchi, Yasuhide
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.5164
Date:
June, 2008
File:
PDF, 225 KB
english, 2008
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