Improvement of Electron Beam Recorder for Mastering of...

Japanese Journal of Applied Physics 2008 / 7 Vol. 47; Iss. 7

Improvement of Electron Beam Recorder for Mastering of Future Storage Media

Wada, Yasumitsu, Tanaka, Hiroshi, Kitahara, Hiroaki, Ozawa, Yasuyuki, Hokari, Mamoru, Nishida, Tetsuya, Suzuki, Tatsundo, Yamaoka, Masahiro, Sugiura, Satoshi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6007
Date:
July, 2008
File:
PDF, 382 KB
english, 2008
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