Spin Coatable Inorganic Resist for High Density Disk...

Japanese Journal of Applied Physics 2008 / 7 Vol. 47; Iss. 7

Spin Coatable Inorganic Resist for High Density Disk Mastering Process Application

Yang, Chin-Tien, Hsu, Ming-Fang, Chang, Sheng-Li, Chen, Jung-Po, Jeng, Tzuan-Ren, Chiu, Kuo-Chi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6023
Date:
July, 2008
File:
PDF, 224 KB
english, 2008
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