Investigation of Surface Layer Formation for Fluorinated...

Japanese Journal of Applied Physics 2008 / 8 Vol. 47; Iss. 8

Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis

Seong, Mi-Ryn, Lee, Gye-Young, Cho, Si-Hyeong, Lim, Hyun-Woo, Park, Jin-Goo, Lee, Caroline Sunyong
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6422
Date:
August, 2008
File:
PDF, 331 KB
english, 2008
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