Observation of the Creation and Annihilation of Local Current Paths in HfO 2 Thin Films on Pt by Ultrahigh-Vacuum Conductive Atomic Force Microscopy: Evidence of Oxygen Spill Over during the Forming Process
Sasaki, Naotaka, Kita, Koji, Toriumi, Akira, Kyuno, KentaroVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.060202
Date:
June, 2009
File:
PDF, 602 KB
english, 2009