Effect of Annealing on Mechanical Properties of Materials Formed by Focused Au or Si Ion-Beam-Induced Chemical Vapor Deposition Using Phenanthrene
Yo, Takuma, Tanaka, Hideaki, Nagata, Takahiro, Fukata, Naoki, Chikyow, Toyohiro, Sakai, Akira, Yanagisawa, JunichiVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.06FB03
Date:
June, 2009
File:
PDF, 390 KB
english, 2009