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Effects of Water Desorption from SiO 2 Substrates on the Thickness of Manganese Oxide Diffusion Barrier Layer Formed by Chemical Vapor Deposition
Matsumoto, Kenji, Neishi, Koji, Itoh, Hitoshi, Miyoshi, Hidenori, Sato, Hiroshi, Hosaka, Shigetoshi, Koike, JunichiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.05FA12
Date:
May, 2010
File:
PDF, 897 KB
english, 2010