Characteristics of Sol–Gel-Derived and Crystallized HfO...

Japanese Journal of Applied Physics 2010 / 12 Vol. 49; Iss. 12

Characteristics of Sol–Gel-Derived and Crystallized HfO 2 Thin Films Dependent on Sol Solution

Shimizu, Hirofumi, Nemoto, Daiki, Ikeda, Masanori, Nishide, Toshikazu
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Volume:
49
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.121502
Date:
December, 2010
File:
PDF, 415 KB
2010
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