SiN$_{x}$ Double Layer Antireflection Coating by...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

SiN$_{x}$ Double Layer Antireflection Coating by Plasma-Enhanced Chemical Vapor Deposition for Single Crystalline Silicon Solar Cells

Gong, Daeyeong, Lee, Youn-Jung, Ju, Minkyu, Ko, Jisoo, Yang, Doohwan, Lee, Yongwoo, Choi, Gyuho, Kim, Sin, Yoo, Jinsu, Choi, Byoungdeog, Yi, Junsin
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Volume:
50
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08KE01
Date:
August, 2011
File:
PDF, 764 KB
2011
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