Formation of High-Density Pt Nanodots on SiO$_{2}$ Induced...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

Formation of High-Density Pt Nanodots on SiO$_{2}$ Induced by Millisecond Rapid Thermal Annealing Using Thermal Plasma Jet for Floating Gate Memory

Makihara, Katsunori, Matsumoto, Kazuya, Yamane, Masato, Okada, Tatsuya, Morisawa, Naoya, Ikeda, Mitsuhisa, Higashi, Seiichiro, Miyazaki, Seiichi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08KE06
Date:
August, 2011
File:
PDF, 686 KB
english, 2011
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