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Damage Analysis of n-GaN Crystal Etched with He and N 2 Plasmas
Niibe, Masahito, Kotaka, Takuya, Kawakami, Retsuo, Nakano, Yoshitaka, Inaoka, Takeshi, Tominaga, Kikuo, Mukai, TakashiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.01af04
Date:
January, 2013
File:
PDF, 183 KB
english, 2013