Effect of doping level during rapid thermal processing of multilayer structures
Abramson, A. R., Nieva, P., Tada, H., Zavracky, P., Miaoulis, I. N., Wong, P. Y.Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0323
Date:
June, 1999
File:
PDF, 308 KB
english, 1999