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Accuracy of focus wedge mark measurement using fitting function for partially coherent illumination
Yashiki, Satoshi, Suwa, Kyoichi, Takeuchi, YuichiroVolume:
54
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.046701
Date:
April, 2015
File:
PDF, 1.28 MB
2015