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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave
A. Ishii, Y. Sakaguchi, S. Minomo, M. Taniguchi, M. Sugiyo, T. KobayashiYear:
1993
DOI:
10.1143/JJAP.32.L802
File:
PDF, 593 KB
1993