Influence of Crystal Originated Particles on Gate Oxide...

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Influence of Crystal Originated Particles on Gate Oxide Breakdown

H. Deai, T. Iwasaki, Y. Ikematsu, K. Kawakami, H. Harada, A. Matsumura
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Year:
1996
DOI:
10.1143/JJAP.35.L1476
File:
PDF, 927 KB
1996
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