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Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering
P. K. Song, H. Akao, M. Kamei, Y. Shigesato, I. YasuiYear:
1999
Language:
english
DOI:
10.1143/JJAP.38.5224
File:
PDF, 278 KB
english, 1999