Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box
H. Habuka, Y. Shimazaki, S. Okamura, F. Sugimoto, T. Takeuchi, M. Aihara, M. Shimada, K. OkuyamaYear:
2003
Language:
english
DOI:
10.1143/JJAP.42.1575
File:
PDF, 134 KB
english, 2003