Time-Dependent Airborne Organic Contamination on Silicon...

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Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

H. Habuka, Y. Shimazaki, S. Okamura, F. Sugimoto, T. Takeuchi, M. Aihara, M. Shimada, K. Okuyama
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Year:
2003
Language:
english
DOI:
10.1143/JJAP.42.1575
File:
PDF, 134 KB
english, 2003
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