Electron Spin Resonance and Photoluminescence Study of...

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Electron Spin Resonance and Photoluminescence Study of Charge Trap Centers in Silicon Nitride Films and Fabrication of Proposed Oxide–Nitride–Oxide Sidewall 2-bit/Cell Nonvolatile Memories

A. Toki, N. Shinohara, Y. Kamigaki, M. Nakano, A. Shibata, T. Okumine, T. Shiomi, K. Sugimoto, T. Negishi, F. Yoshioka, H. Kotaki
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Year:
2008
Language:
english
DOI:
10.1143/JJAP.47.2684
File:
PDF, 478 KB
english, 2008
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