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Analytic Model of Threshold Voltage Variation Induced by Plasma Charging Damage in High-$k$ Metal–Oxide–Semiconductor Field-Effect Transistor
K. Eriguchi, M. Kamei, Y. Takao, K. OnoYear:
2011
DOI:
10.1143/JJAP.50.10PG02
File:
PDF, 504 KB
2011