Effect of Pad Surface Micro-Texture on Removal Rate during...

Japanese Journal of Applied Physics 2013 / 01 Vol. 52; Iss. 1R

Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process

Liao, Xiaoyan, Zhuang, Yun, Borucki, Leonard J., Cheng, Jiang, Theng, Siannie, Ashizawa, Toranosuke, Philipossian, Ara
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.018001
Date:
January, 2013
File:
PDF, 82 KB
english, 2013
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