Effects of slots on thermoelastic quality factor of a vertical beam MEMS resonator
Asadi, Saeid, Sheikholeslami, Tahereh FanaeiVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2652-y
Date:
November, 2016
File:
PDF, 1.94 MB
english, 2016