Effect of lanthanum doping in ceria abrasives on chemical...

Materials Science in Semiconductor Processing 2015 / 05 Vol. 33

Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation

Praveen, B.V.S., Cho, Byoung-Jun, Park, Jin-Goo, Ramanathan, S.
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Volume:
33
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.01.049
Date:
May, 2015
File:
PDF, 2.68 MB
english, 2015
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