Crystallinity of silicon films grown on carbon fibers by...

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Thin Solid Films 2015 / 8

Crystallinity of silicon films grown on carbon fibers by very high frequency plasma enhanced chemical vapor deposition

Chae, Eulyong, Lee, Kyumin, Lee, Hwan, Ko, Dae-Hong, Jeong, Hongsik, Sohn, Hyunchul
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.08.029
Date:
August, 2015
File:
PDF, 603 KB
english, 2015
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