Electron-drift velocity determination in CF...

Journal of Physics D Applied Physics 1999 / 10 Vol. 32; Iss. 20

Electron-drift velocity determination in CF 4 and SF 6 in a strong electric field from breakdown curves of low-pressure RF discharge

Lisovskiy, V A, Yegorenkov, V D
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Volume:
32
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/32/20/310
Date:
October, 1999
File:
PDF, 100 KB
english, 1999
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