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Study of gaseous interactions in carbon nanotube field-effect transistors through selective Si 3 N 4 passivation
Peng, Ning, Zhang, Qing, Tan, Ooi Kiang, Marzari, NicolaVolume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/46/465201
Date:
November, 2008
File:
PDF, 956 KB
english, 2008