An atomistic introduction to anisotropic etching

An atomistic introduction to anisotropic etching

Gosálvez, M A, Sato, K, Foster, A S, Nieminen, R M, Tanaka, H
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/4/S01
Date:
April, 2007
File:
PDF, 8.98 MB
english, 2007
Conversion to is in progress
Conversion to is failed