An atomistic introduction to anisotropic etching
Gosálvez, M A, Sato, K, Foster, A S, Nieminen, R M, Tanaka, HVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/4/S01
Date:
April, 2007
File:
PDF, 8.98 MB
english, 2007