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Exploiting differential etch rates to fabricate large-scale nozzle arrays with protudent geometry
Mukhopadhyay, Deepkishore, Ferreira, Placid MVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/5/011
Date:
May, 2007
File:
PDF, 641 KB
english, 2007