The Structure and I-V Property of a-C:F Thin Film

Plasma Science and Technology 2001 / 10 Vol. 3; Iss. 5

The Structure and I-V Property of a-C:F Thin Film

Feng, Huang, Jian, Kang, Chao, Ye, Shen-dong, Yang, Shan-hua, Cheng, Zhao-yuan, Ning
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Volume:
3
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/3/5/004
Date:
October, 2001
File:
PDF, 331 KB
english, 2001
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