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Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering
Bakoglidis, Konstantinos D., Schmidt, Susann, Garbrecht, Magnus, Ivanov, Ivan G., Jensen, Jens, Greczynski, Grzegorz, Hultman, LarsVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4923275
Date:
September, 2015
File:
PDF, 2.65 MB
english, 2015