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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Optical Scanning 2002 - 3D-confocal microscopy for surface analysis of microstructured materials
Kagerer, Bernd, Brodmann, Rainer, Valentin, Juergen, Filzek, Jan, Popp, Uwe, Sagan, Stephen F., Marshall, Gerald F., Beiser, LeoVolume:
4773
Year:
2002
Language:
english
DOI:
10.1117/12.469201
File:
PDF, 476 KB
english, 2002