Sputtered Dielectric Thin Films with High-Refractive-Index...

Japanese Journal of Applied Physics 1977 / 5 Vol. 16; Iss. 5

Sputtered Dielectric Thin Films with High-Refractive-Index for Optical Waveguide

Yamanaka, Shun-ichi, Naoe, Masahiko, Ishii, Kiyoshi
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Volume:
16
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.16.843
Date:
May, 1977
File:
PDF, 326 KB
1977
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