TEM Observations of Initial Crystallization States for LPCVD Si Films
Adachi, Eimi, Aoyama, Takashi, Konishi, Nobutake, Suzuki, Takaya, Okajima, Yoshiaki, Miyata, KenjiVolume:
27
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.L1809
Date:
October, 1988
File:
PDF, 109 KB
english, 1988