Effects of Excited Plasma Species on Silicon Oxide Films...

Japanese Journal of Applied Physics 1989 / 6 Vol. 28; Iss. Part 1, No

Effects of Excited Plasma Species on Silicon Oxide Films Formed by Microwave Plasma CVD

Fukuda, Takuya, Ohue, Michio, Momma, Naohiro, Suzuki, Kazuo, Sonobe, Tadashi
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Volume:
28
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.1035
Date:
June, 1989
File:
PDF, 515 KB
english, 1989
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