Resonant Third-Harmonic Generation of ArF Laser in H 2 and Kr Gas Jets at 64 nm
Hirakawa, Yasuyuki, Okada, Tatsuo, Maeda, Mitsuo, Muraoka, KatsunoriVolume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L958
Date:
June, 1990
File:
PDF, 683 KB
english, 1990