Preparation of Cu-O Films by Electron Cyclotron Resonance...

Japanese Journal of Applied Physics 1991 / 6 Vol. 30; Iss. Part 1, No

Preparation of Cu-O Films by Electron Cyclotron Resonance Plasma-Assisted Sputtering

Fujii, Takamichi, Anno, Toshihiko, Koyanagi, Tsuyoshi, Hirai, Hidetoshi, Matsubara, Kakuei
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Volume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.1248
Date:
June, 1991
File:
PDF, 612 KB
english, 1991
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