Soft X-Ray Reduction Lithography Using Multilayer Mirrors
Kinoshita, Hiroo, Kurihara, Kenji, Takenaka, HisatakaVolume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.3048
Date:
November, 1991
File:
PDF, 357 KB
english, 1991