Soft X-Ray Reduction Lithography Using Multilayer Mirrors

Soft X-Ray Reduction Lithography Using Multilayer Mirrors

Kinoshita, Hiroo, Kurihara, Kenji, Takenaka, Hisataka
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Volume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.3048
Date:
November, 1991
File:
PDF, 357 KB
english, 1991
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