The Effect of Microwave-Plasma on Decomposition and...

Japanese Journal of Applied Physics 1991 / 6 Vol. 30; Iss. Part 2, No

The Effect of Microwave-Plasma on Decomposition and Oxidation of Ba(THD) 2

Sugii, Nobuyuki, Saito, Shin'ichiro, Imagawa, Kazushige, Saito, Sakae, Kanehori, Keiichi, Takagi, Kazumasa
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Volume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L1118
Date:
June, 1991
File:
PDF, 435 KB
1991
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